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Total 2건 1 페이지

2018
2

"Selective Pore-Sealing of Highly Porous Ultralow-k dielectrics for ULSI Interconnects by Cyclic Initiated Chemical Vapor Deposition Process" Seong Jun Yoon, Kwanyong Pak, Hyun Jun Ahn, Alexander Yoon, Sung Gap Im, and Byung Jin Cho, 2018 Symposium on VLSI Technology, June 18-22, 2018..
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"Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process" Jae Hwan Kim, Hong Keun Park, Kwan Yong Pak, Alex Yoon, Yun Sang Kim, Sung Gap Im, Wan Sik Hwang, and Byung Jin Cho, 2018 IEEE International Electron Devices Meeting (IEDM 2018), Dec. 2018.

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