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Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process
Journal
2018 IEEE International Electron Devices Meeting (IEDM 2018)
Author
Jae Hwan Kim, Hong Keun Park, Kwan Yong Pak, Alex Yoon, Yun Sang Kim, Sung Gap Im, Wan Sik Hwang, and Byung Jin Cho
Year
2018
Date
Dec. 2018

Jae Hwan Kim, Hong Keun Park, Kwan Yong Pak, Alex Yoon, Yun Sang Kim, Sung Gap Im, Wan Sik Hwang, and Byung Jin Cho, "Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process", 2018 IEEE International Electron Devices Meeting, San Francisco, USA, December 1-5, 2018.