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Overcoming Performance Limitation of IGZO FET by iCVD Fluorine Doping 
Journal
2024 Symposium on VLSI Technology and Circuits (2024 VLSI) 
Author
Seung Hyun Oh, Chang Hyeon Lee​, Hee Tae Kim​, Jeong Ik Park​, Min Ju Kim​, Se Jun Park​, Sung Gap Im​, Sung Haeng Cho​ and Byung Jin Cho​
Year
2024
Date
June. 2024
File
VLSI_오승현.png (3.7M) 11회 다운로드 DATE : 2025-03-17 12:04:59

Overcoming Performance Limitation of IGZO FET by iCVD Fluorine Doping 


Seung Hyun Oh​1, Chang Hyeon Lee​1, Hee Tae Kim​1, Jeong Ik Park​1, Min Ju Kim​2, Se Jun Park​3, Sung Gap Im​1, Sung Haeng Cho​4 and Byung Jin Cho​1,*


​1KAIST, Korea, ​2Dankook University, Korea, ​3Samsung Electronics, Korea, ​4ETRI, Korea