Method to Achieve the Morphotropic Phase Boundary in HfxZr1-xO2 by Electric Field Cycling for DRAM Cell Capacitor Applications
- Journal
- IEEE Electron Device Letters
- Year
- 2021
Seongho Kim, Seung Hwan Lee, Min Ju Kim, Wan Sik Hwang, Hyun Soo Jin and Byung Jin Cho, "Method to Achieve the Morphotropic Phase Boundary in HfxZr1-xO2 by Electric Field Cycling for DRAM Cell Capacitor Applications", IEEE Electron Device Letters, Feb. 2021.