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Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
Journal
SOLID-STATE ELECTRONICS
Author
C. K. Kim, H. J. Ahn, J. M. Moon, S. Lee, D. I. Moon, J. S. Park, B. J. Cho, Y. K. Choi, and S. H. Lee
Year
2015
Date
Dec. 2015.

C. K. Kim, H. J. Ahn, J. M. Moon, S. Lee, D. I. Moon, J. S. Park, B. J. Cho, Y. K. Choi, and S. H. Lee, "Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition," SOLID-STATE ELECTRONICS, vol. 114, pp. 90-93, Dec. 2015.