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Surface Passivation of Germanium Using SF6 Plasma to Reduce Source/Drain Contact Resistance in Germanium n-FET
Journal
IEEE ELECTRON DEVICE LETTERS
Author
G. S. Kim. S. H. Kim, J. K. Kin, C. Shin, J. H. Park, K. C. Saraswat, B. J. Cho, and H. Y. Yu
Year
2015
Date
Aug. 2015.

G. S. Kim. S. H. Kim, J. K. Kin, C. Shin, J. H. Park, K. C. Saraswat, B. J. Cho, and H. Y. Yu, "Surface Passivation of Germanium Using SF6 Plasma to Reduce Source/Drain Contact Resistance in Germanium n-FET," IEEE ELECTRON DEVICE LETTERS, vol. 36, no. 8, pp. 745-747, Aug. 2015.