SiGe on Insulator Metal-Oxide-Semiconductor-Field-Effect-Transistor integrated with Schottky Source/Drain and HfO2/TaN Gate Stack
- Journal
- Electrochem. and Solid-State Lett.
- Year
- 2006
F.Gao, S. J. Lee, R. Li, B. J. Cho, S. Balakumar, Chih-Hang Tung, D. Z. Chi, and D. L. Kwong, "SiGe on Insulator Metal-Oxide-Semiconductor-Field-Effect-Transistor integrated with Schottky Source/Drain and HfO2/TaN Gate Stack," Electrochem. and Solid-State Lett., vol. 9, no. 7, pp. G222-G224, Jul. 2006.