Evidence and understanding of atomic layer deposited HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts
- Journal
- IEEE Electron Device Lett.
- Year
- 2004
S. J. Ding, H. Hu, C. Zhu, M. F. Li, S. J. Kim, B. J. Cho, D. S. H. Chan, M. B. Yu, A. Y. Du, A. Chin, and D. L. Kwong, "Evidence and understanding of atomic layer deposited HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts," IEEE Electron Device Lett., vol. 25, no. 10, pp. 681-683, Oct. 2004.