Laser annealing of silicon nanocrystal films prepared by pulsed-laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
- Journal
- J. Vacuum sci. & technol. B
- Year
- 2004
X. Y. Chen, Y. F. Lu, Y. H. Wu, B. J. Cho, B. J. Yang, and Y. F. Liew, "Laser annealing of silicon nanocrystal films prepared by pulsed-laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition," J. Vacuum sci. & technol. B, vol. B22, pp. 1731-1737, Jul. 2004.