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Effect of Annealing on the Composition and Structure of HfO2 and Nitrogen-Incorporated HfO2
Journal
Thin Solid Films
Author
C. C. Yeo, M. S. Joo, B. J. Cho, and S. J. Whoang
Year
2004
Date
Sep. 2004.

C. C. Yeo, M. S. Joo, B. J. Cho, and S. J. Whoang, "Effect of Annealing on the Composition and Structure of HfO2 and Nitrogen-Incorporated HfO2," Thin Solid Films, vol. 462-463, pp. 90-95, Sep. 2004.