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Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
Journal
Nanotechnol.
Author
Y. P. Zeng, Y. F. Lu, Z. X. Zhen, W. X. Sun, T. Yu, L. Liu, J. N. Zeng, B. J. Cho, and C. H. Poon
Year
2004
Date
May. 2004.

Y. P. Zeng, Y. F. Lu, Z. X. Zhen, W. X. Sun, T. Yu, L. Liu, J. N. Zeng, B. J. Cho, and C. H. Poon, "Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon," Nanotechnol., vol. 15, no. 5, pp. 658-662, May. 2004.