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Temperature control and wafer temperature distribution simulation in RTA system
Journal
J. Kor. Inst. Telematics. Electron.
Author
B. J. Cho, K. T. Kim, and C. K. Kim
Year
1988
Date
Jun. 1988.

B. J. Cho, K. T. Kim, and C. K. Kim, "Temperature control and wafer temperature distribution simulation in RTA system", J. Kor. Inst. Telematics. Electron., vol. 25, no. 6, pp. 647-653, Jun. 1988.