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Effect of ZrO2 interfacial layer on forming ferroelectric HfxZryOz on Si substrate
Journal
AIP Advances
Vol
9 (12)
Page
125020. 1-125020. 4
Author
Sang Jae Lee, Min Ju Kim, Tae Yoon Lee, Tae In Lee, Jae Hoon Bong, Sung Won Shin, Seong Ho Kim, Wan Sik Hwang, and Byung Jin Cho
Year
2019
Date
Dec. 2019

Sang Jae Lee, Min Ju Kim, Tae Yoon Lee, Tae In Lee, Jae Hoon Bong, Sung Won Shin, Seong Ho Kim, Wan Sik Hwang, and Byung Jin Cho, "Effect of ZrO2 interfacial layer on forming ferroelectric HfxZryOz on Si substrate", AIP Advances, vol. 9, no. 12, pp. 125020. 1-125020. 4, Dec. 2019.