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Ultrathin ZrOx-Organic Hybrid Dielectric (EOT 3.2 nm) via Initiated Chemical Vapor Deposition for High-Performance Flexible Electronics
Journal
ACS Applied Materials & Interfaces
Vol
11 (47)
Page
44513-44520
Author
Min Ju Kim, Kwanyong Pak, Junhwan Choi, Tae In Lee, Wan Sik Hwang, Sung Gap Im, and Byung Jin Cho
Year
2019
Date
Nov. 2019

Min Ju Kim, Kwanyong Pak, Junhwan Choi, Tae In Lee, Wan Sik Hwang, Sung Gap Im, and Byung Jin Cho, "Ultrathin ZrOx-Organic Hybrid Dielectric (EOT 3.2 nm) via Initiated Chemical Vapor Deposition for High-Performance Flexible Electronics", ACS Applied Materials & Interfaces, vol. 11, no. 47, pp. 44513-44520, Nov. 2019.