Fluorine Effects Originating from the CVD W Process on Charge-Trap Flash Memory Cells
- Journal
- IEEE Transactions on Electron Devices
- Vol
- 66 (1)
- Page
- 378-382
- Year
- 2019
Jungmin Moon, Tae Yoon Lee, Hyun Jun Ahn , Tae In Lee, Wan Sik Hwang , and Byung Jin Cho, "Fluorine Effects Originating from the CVD W Process on Charge-Trap Flash Memory Cells", IEEE Transactions on Electron Devices, vol. 66, no. 1, pp. 378-382, Jan. 2019.