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Novel Vapor-phase Synthesis of Flexible, Homogeneous Organic-Inorganic Hybrid Gate Dielectric with sub-5 nm Equivalent Oxide Thickness
Journal
ACS Applied Materials & Interfaces (Journal Cover)
Vol
10 (43)
Page
37326-37334
Author
Min Ju Kim, Kwanyong Pak, Wan Sik Hwang, Sung Gap Im, and Byung Jin Cho
Year
2018
Date
Oct. 2018

Min Ju Kim, Kwanyong Pak, Wan Sik Hwang, Sung Gap Im, and Byung Jin Cho, "Novel Vapor-phase Synthesis of Flexible, Homogeneous Organic-Inorganic Hybrid Gate Dielectric with sub-5 nm Equivalent Oxide Thickness", ACS Applied Materials & Interfaces, vol. 10, no. 43, pp. 37326-37334, Oct. 2018.