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Very Low Work function ALD-Erbium Carbide (ErC2) Metal Electrode on High-K dielectrics
Journal
IEEE Transaction on Electron Devices
Author
Hyun Jun Ahn, Jungmin Moon, Sungho Koh, Yujin Seo, Choong-Ki Kim, Il Cheol Rho, Choon Hwan Kim, Wan Sik Hwang, and Byung Jin Cho
Year
2016
Date
Jul. 2016.

Hyun Jun Ahn, Jungmin Moon, Sungho Koh, Yujin Seo, Choong-Ki Kim, Il Cheol Rho, Choon Hwan Kim, Wan Sik Hwang, and Byung Jin Cho, "Very Low Work function ALD-Erbium Carbide (ErC2) Metal Electrode on High-K dielectrics", IEEE Transaction on Electron Devices, vol. 63, no. 7, pp. 2858-2863, Jul. 2016.