Formation of shallow phosphorus layers by rapid thermal processing using a solid diffusion source
- Journal
- J. Kor. Inst. Elect. Eng.
- Year
- 1988
K. T. Kim, C. K. Kim, B. J. Cho, and J. G. Kim, "Formation of shallow phosphorus layers by rapid thermal processing using a solid diffusion source", J. Kor. Inst. Elect. Eng., vol. 1, no. 2, pp. 105-109, Sep. 1988.