Characteristics of NMOS transistors with phosphorus source/drain formed by rapid thermal diffusion
- Journal
- J. Kor. Inst. Telematics. Electron
- Year
- 1990
B. J. Cho, J. G. Kim, and C. K. Kim, "Characteristics of NMOS transistors with phosphorus source/drain formed by rapid thermal diffusion", J. Kor. Inst. Telematics. Electron., vol. 27, no. 9, pp. 1409-1418, Sep. 1990.
