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Estimation of effective diffusion time in a rapid thermal diffusion using a solid diffusion source
Journal
IEEE Trans. Electron Devices
Author
B. J. Cho, S. K. Park, and C. K. Kim
Year
1992
Date
Jan. 1992.

B. J. Cho, S. K. Park, and C. K. Kim, "Estimation of effective diffusion time in a rapid thermal diffusion using a solid diffusion source", IEEE Trans. Electron Devices, vol. 39, no. 1, pp. 111-117, Jan. 1992.