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Development of a hexagonal shaped rapid thermal processor using a vertical tube
Journal
IEEE Trans. Semicond. Manuf.
Author
B. J. Cho, P. Vandenabeele and K. Maex
Year
1994
Date
Aug. 1994.

B. J. Cho, P. Vandenabeele and K. Maex, "Development of a hexagonal shaped rapid thermal processor using a vertical tube", IEEE Trans. Semicond. Manuf., vol. 7, no. 3, pp. 345-353, Aug. 1994.