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Shallow p+ -n junction formation by Ge pre-amorphization and additional RTA
Journal
J. Kor. Appl. Phys.
Author
J. G. Oh, K. H. Lee, B. J. Cho, and J. C. Kim
Year
1996
Date
Jul. 1996.

J. G. Oh, K. H. Lee, B. J. Cho, and J. C. Kim, "Shallow p+ -n junction formation by Ge pre-amorphization and additional RTA", J. Kor. Appl. Phys., vol. 9, no. 4, p. 506, Jul. 1996.