Nano-trenched local oxidation of silicon isolation using island polysilicon grains
- Journal
- J. Electrochem. Soc
- Year
- 1996
S. K. Kwon, C. Lim, B. J. Cho, and J. C. Kim, "Nano-trenched local oxidation of silicon isolation using island polysilicon grains", J. Electrochem. Soc., vol. 143, no. 2, pp. 639-642, Feb. 1996.