Journals

  • Home
  • Publication
  • Journals
A mechanism of field-oxide-ungrowth phenomenon on recessed LOCOS isolation process and practical solution
Journal
J. Electrochem. Soc.
Author
S. A. Jang, Y. B. Kim, B. J. Cho, and J. C. Kim
Year
1997
Date
Aug. 1997.

S. A. Jang, Y. B. Kim, B. J. Cho, and J. C. Kim, "A mechanism of field-oxide-ungrowth phenomenon on recessed LOCOS isolation process and practical solution", J. Electrochem. Soc., vol. 144, no. 8, pp. 2933-2940, Aug. 1997.