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Anomalous field-oxide-ungrowth phenomenon in recessed LOCOS isolation structure
Journal
J. Electrochem. Soc.
Author
B. J. Cho, S. A. Jang, Y. B. Kim, D. D. Lee, and J. C. Kim
Year
1997
Date
Jan. 1997.

B. J. Cho, S. A. Jang, Y. B. Kim, D. D. Lee, and J. C. Kim, "Anomalous field-oxide-ungrowth phenomenon in recessed LOCOS isolation structure", J. Electrochem. Soc., vol. 144, no. 1, pp. 320-326, Jan. 1997.