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Isolation process induced wafer warpage
Journal
Electrochem. Solid-State Lett
Author
S. A. Jang, I. S. Yeo, Y. B. Kim, and B. J. Cho
Year
1998
Date
Jul. 1998.

S. A. Jang, I. S. Yeo, Y. B. Kim, and B. J. Cho, "Isolation process induced wafer warpage", Electrochem. Solid-State Lett., vol. 1, no. 1, pp. 46-48, Jul. 1998.