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Electron-beam irradiation-induced gate oxide degradation
Journal
J. Appl. Phys.
Author
B. J. Cho, P. F. Chong, E. F. Chor, M. S. Joo, and I. S. Yeo
Year
2000
Date
Dec. 2000.

B. J. Cho, P. F. Chong, E. F. Chor, M. S. Joo, and I. S. Yeo, "Electron-beam irradiation-induced gate oxide degradation", J. Appl. Phys., vol. 88, no. 11, pp. 6731-6735, Dec. 2000.