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Annealing of Fowler-Nordheim stress-induced leakage currents in thin silicon dioxide films
Journal
J. Electrochem. Soc.
Author
C. H. Ang, C. H. Ling, Z. Y. Cheng, S. J. Kim, and B. J. Cho
Year
2000
Date
Dec. 2000.

C. H. Ang, C. H. Ling, Z. Y. Cheng, S. J. Kim, and B. J. Cho, "Annealing of Fowler-Nordheim stress-induced leakage currents in thin silicon dioxide films", J. Electrochem. Soc., vol. 147, no. 12, pp. 4676-4682, Dec. 2000.