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Does short wavelength lithography process degrade the integrity of thin gate oxide?
Journal
Microelectron. Rel.
Author
S. J. Kim, B. J. Cho, P. F. Chong, E. F. Chor, C. H. Ang, C. H. Ling, M. S. Joo, and I. S. Yeo
Year
2000
Date
Oct. 2000.

S. J. Kim, B. J. Cho, P. F. Chong, E. F. Chor, C. H. Ang, C. H. Ling, M. S. Joo, and I. S. Yeo, "Does short wavelength lithography process degrade the integrity of thin gate oxide?", Microelectron. Rel., vol. 40, no. 8-10, pp. 1609-1613, Oct. 2000.