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A high performance MIM capacitor using HfO2 dielectrics
Journal
IEEE Electron Device Lett.
Author
H. Hang, C. Zhu, Y. F. Lu, M. F. Li, B. J. Cho, and W. K. Choi
Year
2002
Date
Sep. 2002.

H. Hang, C. Zhu, Y. F. Lu, M. F. Li, B. J. Cho, and W. K. Choi, "A high performance MIM capacitor using HfO2 dielectrics", IEEE Electron Device Lett., vol. 23, no. 9, pp. 514-516, Sep. 2002.