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Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
Journal
Appl. Phys. Lett.
Author
X. Y. Chen, Y. F. Lu, B. J. Cho, Y. P. Zeng, and Y. H. Wu
Year
2002
Date
Aug. 2002.

X. Y. Chen, Y. F. Lu, B. J. Cho, Y. P. Zeng, and Y. H. Wu, "Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation", Appl. Phys. Lett., vol. 81, no. 7, pp. 1344-1346, Aug. 2002.