Journals

  • Home
  • Publication
  • Journals
Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
Journal
Electrochem. Solid-State Lett.
Author
C. H. Ang, S. S. Tan, C. M. Lek, W. Lin, Z. J. Zheng, T. Chen, and B. J. Cho
Year
2002
Date
Apr. 2002.

C. H. Ang, S. S. Tan, C. M. Lek, W. Lin, Z. J. Zheng, T. Chen, and B. J. Cho, "Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation", Electrochem. Solid-State Lett., vol. 5, no. 4, pp. G26-G28, 2002.