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A high density MIM capacitor (13fF/um2) using ALD HfO2 dielectrics
Journal
IEEE Electron Device Lett.
Author
X. Yu, C. Zhu, H. Hu, A. Chin, M. F. Li, B. J. Cho, D. L. Kwong, P. D. Foo, M. B. Yu
Year
2003
Date
Feb. 2003.

X. Yu, C. Zhu, H. Hu, A. Chin, M. F. Li, B. J. Cho, D. L. Kwong, P. D. Foo, M. B. Yu, "A high density MIM capacitor (13fF/um2) using ALD HfO2 dielectrics", IEEE Electron Device Lett., vol. 24, no. 2, pp. 63-65, Feb. 2003.