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Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO2 film
Journal
Thin Solid Films
Author
M.Balasubramanian, L. K. Bera, S. Mathew, N. Balasubramanian, V. Lim, M. S. Joo, and B. J. Cho
Year
2004
Date
Sep. 2004.

M.Balasubramanian, L. K. Bera, S. Mathew, N. Balasubramanian, V. Lim, M. S. Joo, and B. J. Cho, "Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO2 film," Thin Solid Films, vol. 462-463, pp. 101-105, Sep. 2004.