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Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition
Journal
Applied Surface Science
Author
X. Y. Chen, Y. F. Lu, Y. H. Wu, B. J. Cho, L. J. Tang, D. Lu, and J. R. Dong
Year
2006
Date
Dec. 2006.

X. Y. Chen, Y. F. Lu, Y. H. Wu, B. J. Cho, L. J. Tang, D. Lu, and J. R. Dong, "Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition," Applied Surface Science, vol. 253, no. 5, pp. 2718-2726, Dec. 2006.