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Low energy N2 ion bombardment for removal of (HfO2)x(SiON)1-x in dilute HF
Journal
J. Vacuum Sci. and Technol. -Section A
Author
W. S. Hwang, B. J. Cho, D. S. H. Chan, and W. J. Yoo
Year
2007
Date
Jul. 2007.

W. S. Hwang, B. J. Cho, D. S. H. Chan, and W. J. Yoo, "Low energy N2 ion bombardment for removal of (HfO2)x(SiON)1-x in dilute HF", J. Vacuum Sci. and Technol. -Section A, vol. 25, no. 4, pp. 1056-1061, Jul. 2007.