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High-Performance MIM Capacitors Using HfLaO-Based Dielectrics
Journal
IEEE Electron Device Lett.
Author
L. Zhang, W. He, D. S. H. Chan, and B. J. Cho
Year
2010
Date
Jan. 2010.

L. Zhang, W. He, D. S. H. Chan, and B. J. Cho, “High-Performance MIM Capacitors Using HfLaO-Based Dielectrics", IEEE Electron Device Lett., vol. 31, no. 1, pp. 17-19, Jan. 2010.