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Ultrathin graphene and graphene oxide layers as a diffusion barrier for advanced Cu metallization
Journal
Appl. Phys. Lett.
Author
Jae Hoon Bong, Seong Jun Yoon, Alexander Yoon, Wan Sik Hwang, and Byung Jin Cho
Year
2015
Date
Feb. 2015.

Jae Hoon Bong, Seong Jun Yoon, Alexander Yoon, Wan Sik Hwang, and Byung Jin Cho, "Ultrathin graphene and graphene oxide layers as a diffusion barrier for advanced Cu metallization", Appl. Phys. Lett., vol 106, pp.063112, Feb. 2015.