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Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (< 2 nanometer) Polymer Coating
Journal
ACS Nano
Author
Seong Jun Yoon, Kwanyoung Pak, Taewook Nam, Alexander Yoon, Hyungjun Kim, Sung Gap Im, Byung Jin Cho
Year
2017
Date
Aug. 2017.
File
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cover2.PNG


Seong Jun Yoon, Kwanyong Pak, Taewook Nam, Alexander Yoon, Hyungjun Kim, Sung Gap Im, Byung Jin Cho, "Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (< 2 nm) Polymer Coating", ACS Nano, Vol. 11, No. 8, pp.7841-7847, July. 2017.