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Large Grain Ruthenium for Alternative Interconnects
Journal
IEEE Electron Device Letters
Vol
40 (1)
Page
91-94
Author
Seong Jun Yoon, Sangjae Lee, Tae In Lee, Alexander Yoon, and Byung Jin Cho
Year
2019
Date
Jan. 2019

Seong Jun Yoon, Sangjae Lee, Tae In Lee, Alexander Yoon, and Byung Jin Cho, "Large Grain Ruthenium for Alternative Interconnects", IEEE Electron Device Letters, vol. 40, no. 1, pp. 91-94, Jan. 2019.