In-Depth Study on Mechanism of the Performance Improvement by High Temperature Annealing of the Al2O3 in a Charge-Trap Type Flash Memory Device
- Year
- 2010
- Author
- Jong Kyung Park, Youngmin Park, Sung Kyu Lim, Jae Sub Oh, Moon Sig Joo, Kwon Hong, and Byung Jin Cho
- Conference
- 2010 International Conference on Solid State Devices and Materials (SSDM 2010)
Jong Kyung Park, Youngmin Park, Sung Kyu Lim, Jae Sub Oh, Moon Sig Joo, Kwon Hong, and Byung Jin Cho, “In-Depth Study on Mechanism of the Performance Improvement by High Temperature Annealing of the Al2O3 in a Charge-Trap Type Flash Memory Device", 2010 International Conference on Solid State Devices and Materials (SSDM 2010), Tokyo, Japan, September 2010.
September 2010.
Tokyo, Japan