Electrical and Physical Properties of ALD HfLaO for CMOS Device Application
- Year
- 2008
- Author
- W. He, S. -J. Kim, Y. -S. Kim, B. J. Cho,
- Conference
- Material Research Society 2008 Spring Meeting, Symposium H
W. He, S. -J. Kim, Y. -S. Kim, B. J. Cho, “Electrical and Physical Properties of ALD HfLaO for CMOS Device Application”. Material Research Society 2008 Spring Meeting, Symposium H, pp. 121, San Francisco, USA, Apr., 2008.
Apr., 2008.
San Francisco, USA