Feasibility of Metal Carbides for Metal Gate CMOS Devices
- Year
- 2008
- Author
- B. J. Cho and W. S. Hwang
- Conference
- SEMI Technology Symposium 2008
B. J. Cho and W. S. Hwang, "Feasibility of Metal Carbides for Metal Gate CMOS Devices ", SEMI Technology Symposium 2008, pp. 233 - 238, Seoul, Korea, Jan., 2008. (Invited).
Jan., 2008.
Seoul, Korea