Metal Carbide Electrodes for Gate-First Metal Gate CMOS Process
- Year
- 2007
- Author
- Byung Jin Cho, Wan Sik Hwang, and Daniel S. H. Chan
- Conference
- IEEE 4th International Symposium on Advanced Gate Stack Technology
Byung Jin Cho, Wan Sik Hwang, and Daniel S. H. Chan, “Metal Carbide Electrodes for Gate-First Metal Gate CMOS Process”, IEEE 4th International Symposium on Advanced Gate Stack Technology, Sep., 2007, Dallas, Texas, USA. (Invited).
Sep., 2007
Dallas, Texas, USA