Impact of interfacial layer control in high-K gate dielectrics on GaAs for advanced CMOS devices
- Year
- 2007
- Author
- G. K. Dalapati, Y. Tong, W. Y. Loh, and B. J. Cho
- Conference
- 2007 MRS Spring Meeting
G. K. Dalapati, Y. Tong, W. Y. Loh, and B. J. Cho, "Impact of interfacial layer control in high-K gate dielectrics on GaAs for advanced CMOS devices", 2007 MRS Spring Meeting, Symposium G: Extending Moore’s Law with Advanced Channel Materials, San Francisco, CA, April 2007.
April 2007.
San Francisco, CA