Integration of high-K gate dielectric into high mobility substrate
- Year
- 2006
- Author
- B. J. Cho,
- Conference
- 2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES SCIENCE AND TECHNOLOGY
B. J. Cho, "Integration of high-K gate dielectric into high mobility substrate", 2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES SCIENCE AND TECHNOLOGY, Kawasaki, Japan, 2006 (Invited).
2006
Kawasaki, Japan