Formation of Phosphorus-doped shallow source/drain junctions for Ge MOSFET
- Year
- 2005
- Author
- D.Poon, L. S. Tan, B. J. Cho, A. Y. Du, and L. Chan
- Conference
- 3rd International Conference on Materials for Advanced Technologies, Symposium H
D.Poon, L. S. Tan, B. J. Cho, A. Y. Du, and L. Chan, "Formation of Phosphorus-doped shallow source/drain junctions for Ge MOSFET", 3rd International Conference on Materials for Advanced Technologies, Symposium H: Silicon Microelectronics: Processing to Packaging, p. 5, MRS Singapore, July 2005.
July 2005
MRS Singapore