Top-Surface Aluminized and Nitrided Hafnium Oxide Using Synthesis of Thin AlN and HfO2 Stacked Layer
- Year
- 2004
- Author
- C. S. Park, B. J. Cho, L. J. Tang, W. Wang, and D. L. Kwong,
- Conference
- International Conf. on Solid State Devices and Materials (SSDM),The Japan Society of Applied Physics
C. S. Park, B. J. Cho, L. J. Tang, W. Wang, and D. L. Kwong, "Top-Surface Aluminized and Nitrided Hafnium Oxide Using Synthesis of Thin AlN and HfO2 Stacked Layer", International Conf. on Solid State Devices and Materials (SSDM), The Japan Society of Applied Physics, Japan, Sept. 2004.
Sept. 2004
Japan, Sept. 2004