Dual Metal and fully silicided metal gate processes with tunable workfunction
- Year
- 2004
- Author
- B. J. Cho
- Conference
- International NanoElectronics Materials Conference,
B. J. Cho, "Dual Metal and fully silicided metal gate processes with tunable workfunction", International NanoElectronics Materials Conference, Grenoble, France, March 2004. (Invited).
March 2004
Grenoble, France