Electrical and physical properties of Si1-xGex/HfO2/Si MOS-capacitors
- Year
- 2003
- Author
- N. Wu, C. Zhu, N. Balasubramanian, C. C. Yeo, M. S. Joo, H. Y. Yu, Q. C. Zhang, L. K. Bera, B. J. Cho, M. F. Li, S. J. Whoang
- Conference
- 2nd International Conference on Materials for Advanced Technologies,
N. Wu, C. Zhu, N. Balasubramanian, C. C. Yeo, M. S. Joo, H. Y. Yu, Q. C. Zhang, L. K. Bera, B. J. Cho, M. F. Li, S. J. Whoang, "Electrical and physical properties of Si1-xGex/HfO2/Si MOS-capacitors", 2nd International Conference on Materials for Advanced Technologies, p. 535, MRS Singapore, December 2003.
December 2003
MRS Singapore